Poster Session P4

[P4-06] Application of Triode High-Power Pulsed Magnetron Sputtering for fabrication of HfN Spindt-type Field Emitter Array

*Shun Kondo^1,2, Takeo Nakano¹, Md. Suruz Mian¹, Masayoshi Nagao², Hiromasa Murata² (1. Seikei University, 2. National Institute of Advanced Industrial Science and Technology)