Poster Session P4

[P4-10] Evaluation of gas rarefaction phenomenon from discharge delay time in deep oscillation magnetron sputtering

*Eisuke Yokoyama¹, Yuki Nakagawa¹, Hiroki Kobayashi¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Masahide Tona², Hiroaki Yamamoto², Keizo Tsukamoto², Kiyokazu Fuke³, Keijiro Ohshimo⁴, Fuminori Misaizu⁴ (1. Tokyo Polytechnic University, 2. Ayabo Corporation, 3. Kobe University, 4. Tohoku University)