Poster Session P4

[P4-11] Observation of laser-induced fluorescence in the deposition region of high-power pulsed magnetron sputtering (HPPMS)

*Yuki Nakagawa¹, Hiroki Kobayashi¹, Eisuke Yokoyama¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Masahide Tona², Hiroaki Yamamoto², Keizo Tsukamoto², Kiyokazu Fuke³, Keijiro Ohshimo⁴, Fuminori Misaizu⁴ (1. Tokyo Polytechnic University, 2. Ayabo Corporation, 3. Kobe University, 4. Tohoku University)