Poster Session P4

[P4-12] Time-evolution measurements of ion particles formed in high-power pulsed magnetron sputtering using a reflectron-type time-of-flight mass spectrometer

*Hiroki Kobayashi¹, Yuki Nakagawa¹, Eisuke Yokoyama¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Masahide Tona², Hiroaki Yamamoto², Keizo Tsukamoto², Kiyokazu Fuke³, Keijiro Ohshimo⁴, Fuminori Misaizu⁴ (1. Tokyo Polytechnic University, 2. Ayabo Corporation, 3. Kobe University, 4. Tohoku University)