The Effect of Nitrogen Gas Blowing on Graphite Targets on the Properties of ta-CNx Coatings Deposited via FCVA Method

Taiga Goto

Presentation information

Technical Session

Technical sessions » Advanced Tribology Material

DLC and Carbon Related Coatings 4

Fri. Sep 29, 2023 1:30 PM - 2:50 PM Room C (Room 502/503)

Hiroyuki Kousaka (Gifu University, Japan)
Young Jun Jang (Korea Institute of Materials Science, Korea)

1:50 PM - 2:10 PM

[29-C-07] The Effect of Nitrogen Gas Blowing on Graphite Targets on the Properties of ta-CNx Coatings Deposited via FCVA Method

*Taiga Goto¹, Woo-Young Lee², Noritsugu Umehara¹, Takayuki Tokoroyama¹, Motoyuki Murashima³ (1. Nagoya University, Japan, 2. Korea photonics Technology Instisute, Korea, 3. Tohoku University, Japan)

Keywords:ta-CNx, Hardness, FCVA, Nano-indentation

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