DLC and Carbon Related Coatings 4

[29-C-08] Surface Roughness Variations of Quartz Surfaces Using Ultra-thin Amorphous Carbon Films

*Abdelrahman Abdelati¹, Takeharu Motokawa², Noriko Iida², Junho Choi¹ (1. Mechanical Engineering department, The University of tokyo, Japan, 2. Institute of Memory Technology Research & Development, Kioxia Corporation , Japan)

Keywords:DLC, Thin layer deposition , Molecular dynamics