DLC and Carbon Related Coatings 4

[29-C-07] The Effect of Nitrogen Gas Blowing on Graphite Targets on the Properties of ta-CNx Coatings Deposited via FCVA Method

*Taiga Goto¹, Woo-Young Lee², Noritsugu Umehara¹, Takayuki Tokoroyama¹, Motoyuki Murashima³ (1. Nagoya University, Japan, 2. Korea photonics Technology Instisute, Korea, 3. Tohoku University, Japan)

キーワード：ta-CNx, Hardness, FCVA, Nano-indentation