[Mon-A1] Vacuum Vision 2030

[Mon-A1-2] Development of an ISO Technical Specification of a new type of ionization vacuum gauge suitable as reference standard

*Karl Joseph Jousten¹, Matthias Bernien¹, Claus Illgen¹, Janez Setina², Martin Wüest³ (1. Physikalisch-Technische Bundesanstalt (PTB) (Germany), 2. Insitute of Metals (Slovenia), 3. INFICON AG (Liechtenstein))

Keywords:Ionisation vacuum gauge, vacuum measurement, standard, ISO