IVC-22

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Parallel Sessions

Vacuum Vision 2030

[Mon-A1] Vacuum Vision 2030

Mon. Sep 12, 2022 1:15 PM - 3:15 PM Room A (Main Hall)

1:45 PM - 2:00 PM

[Mon-A1-3] BeCu - WATMASS GA System

*Sam Kishikawa1, Masahide Kuroiwa1 (1. Tokyo Electronics Co., Ltd. (Japan))

Keywords:BeCu, QMS, UHV, XHV, MEMS

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