IVC-22

Presentation information

Print

Parallel Sessions

Vacuum Vision 2030

[Mon-A1] Vacuum Vision 2030

Mon. Sep 12, 2022 1:15 PM - 3:15 PM Room A (Main Hall)

2:00 PM - 2:15 PM

[Mon-A1-4] Green technologies for vacuum system on WFE

*Yohei Yoda1, Shinichi Sekiguchi1 (1. EBARA Corporation (Japan))

Keywords:SDGs, Vacuum pump, Abatement, Green fab

Please log in with your participant account.
» Participant Log In