IVC-22

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Parallel Sessions

Vacuum Vision 2030

[Mon-A1] Vacuum Vision 2030

Mon. Sep 12, 2022 1:15 PM - 3:15 PM Room A (Main Hall)

2:15 PM - 2:45 PM

[Mon-A1-5I] Vacuum control technology for semiconductor manufacturing equipment

*Yusuke Sano1, Akihiro Ito1 (1. CKD CORPORATION (Japan))

Keywords:Vacuum control

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