IVC-22

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Parallel Sessions

Vacuum Vision 2030

[Mon-A2] Vacuum Vision 2030

Mon. Sep 12, 2022 3:30 PM - 5:30 PM Room A (Main Hall)

4:45 PM - 5:00 PM

[Mon-A2-3] Atomic Layer Deposition (ALD) in a Vacuum with Activated Species from Ozone for Oxide Film Synthesis

Naoto Kameda1, Soichiro Motoda1, Takayuki Hagiwara1, *Ken Nakamura2, Hidehiko Nonaka2 (1. MEIDEN NANOPROCESS INNOVATIONS, Inc. (Japan), 2. AIST (Japan))

Keywords:vacuum, ozone, oxide, thin film, atomic layer deposition

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