IVC-22

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Parallel Sessions

Vacuum Science and Technology

[Mon-D1] Vacuum Science and Technology -- Outgassing, Adsorption, Desorption

Mon. Sep 12, 2022 1:15 PM - 3:15 PM Room D (Mid-sized Hall B)

1:30 PM - 1:45 PM

[Mon-D1-2] Characterization of small vacuum process vessels made of 0.2% Be-Cu material

*Takao Nakamura1, Masahide Kuroiwa2, Shinsuke Kishikawa2, Ryuichiro Kamei3 (1. Institute of Industrial Science, The University of Tokyo, 2. Tokyo Electronics Co. Ltd., 3. Seinan Industry Co. Ltd.)

Keywords:Be-Cu, vacuum vessel, outgas

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