IVC-22

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Parallel Sessions

Vacuum Science and Technology

[Mon-D1] Vacuum Science and Technology -- Outgassing, Adsorption, Desorption

Mon. Sep 12, 2022 1:15 PM - 3:15 PM Room D (Mid-sized Hall B)

1:45 PM - 2:00 PM

[Mon-D1-3] Analysis of outgassing using both TD-GC/MS and TDS

*Risa Naruse1, Sakae Inayoshi1 (1. ULVAC, Inc. (Japan))

Keywords:outgassing, TDS, TD-GC/MS

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