[Mon-D1] Vacuum Science and Technology -- Outgassing, Adsorption, Desorption

[Mon-D1-2] Characterization of small vacuum process vessels made of 0.2% Be-Cu material

*Takao Nakamura¹, Masahide Kuroiwa², Shinsuke Kishikawa², Ryuichiro Kamei³ (1. Institute of Industrial Science, The University of Tokyo, 2. Tokyo Electronics Co. Ltd., 3. Seinan Industry Co. Ltd.)

キーワード：Be-Cu, vacuum vessel, outgas