[Mon-D1] Vacuum Science and Technology -- Outgassing, Adsorption, Desorption

[Mon-D1-4] Vacuum Performance of a Semiconductor Wafer Handling System made by Aluminum Alloy with Low Outgassing Surface Finish

*Naoki Ogawa¹, Hiroki Kurisu², Setsuo Yamamoto² (1. RORZE Corporation (Japan), 2. Univ. of Yamaguchi (Japan))

キーワード：outgassing, aluminum alloy, surface finishing