IVC-22

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Parallel Sessions

ISSP / Surface Engineering

[Thu-H1] ISSP / Surface Engineering

Thu. Sep 15, 2022 10:15 AM - 11:45 AM Room H (Meeting Room 204)

11:30 AM - 11:45 AM

[Thu-H1-6] Crystal orientations of hafnium nitride thin films prepared at different positions by rf magnetron sputtering

*Tomoaki Osumi1, Yasuhito Gotoh1 (1. Department of Electronic Science and Engineering, Kyoto University (Japan))

Keywords:hafnium nitride, crystal orientation, substrate position, rf magnetron sputtering

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