[Tue-D1] Joint session of Non-Evaporable Getter Coating and Vacuum Science and Technology -- Fundamental Research and Characterization

[Tue-D1-2] Activation of getter films studied by in situ NRA

*Clement Bessouet¹, Charaf Eddine Bejjit², Charlotte Kutyla¹, Thierry Sauvage², Sylvain Lemettre¹, Alain Bosseboeuf¹, Philippe Coste¹, Babacar Diallo², Aurelien Bellamy², Olivier Wendling², Piyush Jagtap³, Stephanie Escoubas³, Christophe Guichet³, Olivier Thomas³, Johan Moulin¹ (1. C2N Nanored, Univ. Paris-Saclay, CNRS, UMR 9001 (France), 2. CEMHTI, CNRS, UPR 3079 (France), 3. IM2NP, Univ. Aix-Marseille, CNRS, UMR 7334 (France))

キーワード：NEG: Non-Evaporable Getter, IBA: Ion Beam Analyses, in situ NRA, Oxydation