IVC-22

Presentation information

Poster Session

Poster Session (17:00-18:30)

[Tue-PO1A] Poster Session (17:00-18:30) Category A

Tue. Sep 13, 2022 5:00 PM - 6:30 PM Poster A (Main Hall)

[Tue-PO1A-14] Graphene Layer Control on SrTiO3 for High-Quality Epilayer Growth

*Ji Eun Kang1, Ki Seok Kim2, Ki Hyun Kim1, Seong Jae Yu1, You Jin Ji1, Geun Young Yeom1,3 (1. School of Advanced Materials Science and Engineering, Sungkyunkwan University (Korea), 2. Research Laboratory of Electronics, Massachusetts Institute of Technology (United States of America), 3. SKKU Advanced Institute of Nano Technology (SAINT), Sungkyunkwan University (Korea))

Keywords:Plasma etching, Graphene, Layer control, Remote epitaxy, SrTiO3

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