[Tue-PO1A] Poster Session (17:00-18:30) Category A

[Tue-PO1A-14] Graphene Layer Control on SrTiO₃ for High-Quality Epilayer Growth

*Ji Eun Kang¹, Ki Seok Kim², Ki Hyun Kim¹, Seong Jae Yu¹, You Jin Ji¹, Geun Young Yeom^1,3 (1. School of Advanced Materials Science and Engineering, Sungkyunkwan University (Korea), 2. Research Laboratory of Electronics, Massachusetts Institute of Technology (United States of America), 3. SKKU Advanced Institute of Nano Technology (SAINT), Sungkyunkwan University (Korea))

キーワード：Plasma etching, Graphene, Layer control, Remote epitaxy, SrTiO3