[Tue-PO1A] Poster Session (17:00-18:30) Category A

[Tue-PO1A-16] Deposition Mechanism for Hydrophilic Low-Refractive-Index Optical TiO₂ Thin Films Fabricated by Simultaneous Electron Beam Evaporation and Sputtering

*Mai Hayamizu¹, Hiroshi Murotani¹ (1. Tokai university (Japan))

キーワード：Optical thin film, Combination deposition, Low refractive index , TiO2