[Tue-PO1A] Poster Session (17:00-18:30) Category A

[Tue-PO1A-18] Crystallinity Improvement of Zinc Oxide Films at Low Temperature Deposition Using Reactive HiPIMS

*Md. Suruz Mian¹, Miho Hagino¹, Rie Kawahigashi¹, Takeo Nakano¹, Kunio Okimura² (1. Seikei Univ. (Japan), 2. Tokai Univ. (Japan))

キーワード：Low temperature Deposition, ZnO, HiPIMS, VO2