[Tue-PO1A] Poster Session (17:00-18:30) Category A

[Tue-PO1A-19] Influence of gas species on characteristics of High-Power Pulsed Sputtering plasma

*Taishin Sato¹, Shoki Abe¹, Katsuyuki Takahashi^1,2, Seiji Mukaigawa¹, Koichi Takaki^1,2 (1. Iwate university (Japan), 2. Agri-innovation center, Iwate university (Japan))

キーワード：Penning discharge, HiPIMS, Glow discharge