[Tue-PO1A] Poster Session (17:00-18:30) Category A

[Tue-PO1A-21] Examination of ion irradiation effect by Ni films on fluoropolymers substrate prepared using magnetron sputtering with multipolar magnetic plasma confinement assisted by inductively coupled plasma

*Keisuke Mine¹, Hiroshi Toyota¹ (1. Hiroshima Institute of Technology (Japan))

キーワード：Ion irradiation effect, sputtering, Ni thin film