IVC-22

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Poster Session

Poster Session (17:00-18:30)

[Tue-PO1D] Poster Session (17:00-18:30) Category D

Tue. Sep 13, 2022 5:00 PM - 6:30 PM Poster D (Main Hall)

[Tue-PO1D-13] Sputtering Simulation of the Film Thickness Distribution and Film Property Distribution

*Kohei Kuroshima1, Ichirou Ikeda1, Shigeji Sugimoto1, Masashi Iguchi1, Yasuhito Gotoh2 (1. OSAKA VACUUM, LTD. (Japan), 2. Kyoto University (Japan))

Keywords:Thin Film, Sputtering, Simulation

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