[Tue-PO1E] Poster Session (17:00-18:30) Category E

[Tue-PO1E-14] Award Applied
Development of a nonevaporable getter pump using oxygen-free titanium deposition with partially nitrided surfce

*Keisuke Yoshida¹, Takashi Kikuchi², Kazuhiko Mase^3,2, Shinya Ohno¹ (1. Graduate School of Engineering Science, Yokohama National University (Japan), 2. Institute of Materials Structure Science, KEK (Japan), 3. Department of Materials Structure Science, SOKENDAI (Japan))

キーワード：oxygen-free titanium, nitride