[Wed-D1] Non-Evaporable Getter Coating

[Wed-D1-1I] NEG coating technology and innovation from an industrial perspective

*Enrico Maccallini¹, Tommaso Porcelli², Michele Mura³, Paolo Manini⁴ (1. SAES GETTERS (Italy), 2. SAES GETTERS (Italy), 3. SAES GETTERS (Italy), 4. SAES GETTERS (Italy))

キーワード：NEG coating, Pumping system, PSD, Outgassing