[Wed-D1] Non-Evaporable Getter Coating

[Wed-D1-8] Cooperation between basic sciences and industry makes cutting-edge technology possible – Two different worlds that need a common language regarding vacuum cleanliness

*Klaus Bergner¹, Francisc Haidu¹, Christian Worsch¹, Michael Flämmich¹ (1. VACOM Vakuum Komponenten & Messtechnik GmbH (Germany))

キーワード：Ultraclean Vacuum, Extreme High Vacuum, Ultrahigh Vacuum, Manufacturing