IVC-22

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Parallel Sessions

Vacuum Science and Technology

[Wed-D2] Vacuum Science and Technology -- Vacuum Devices, Applications

Wed. Sep 14, 2022 4:30 PM - 6:30 PM Room D (Mid-sized Hall B)

4:45 PM - 5:00 PM

[Wed-D2-2] Development of Micro Arc Oxidation treatment for vacuum equipment components for Flat Panel Displays

*Fumiaki Ishigure1, Sakae Inayoshi1, Yoshiaki Yamamoto1, Hiroshi Sato2 (1. ULVAC Inc. (Japan), 2. ULVAC TECHNO Inc. (Japan))

Keywords:MAO, CVD, Anodized, Almite, Etching

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