[Wed-D2] Vacuum Science and Technology -- Vacuum Devices, Applications

[Wed-D2-2] Development of Micro Arc Oxidation treatment for vacuum equipment components for Flat Panel Displays

*Fumiaki Ishigure¹, Sakae Inayoshi¹, Yoshiaki Yamamoto¹, Hiroshi Sato² (1. ULVAC Inc. (Japan), 2. ULVAC TECHNO Inc. (Japan))

キーワード：MAO, CVD, Anodized, Almite, Etching