IVC-22

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Parallel Sessions

Vacuum Science and Technology

[Wed-D2] Vacuum Science and Technology -- Vacuum Devices, Applications

Wed. Sep 14, 2022 4:30 PM - 6:30 PM Room D (Mid-sized Hall B)

5:00 PM - 5:15 PM

[Wed-D2-3] The challenges of heating a sample in vacuum

*Freek Molkenboer1, Han Velthuis1, Peter Kerkhof1, Arjan Burema1, Hans Haasnoot1, Thijs Hooftman1, Henk Lensen1 (1. TNO (Netherlands))

Keywords:vacuum, EUV

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