[Wed-D2] Vacuum Science and Technology -- Vacuum Devices, Applications

[Wed-D2-3] The challenges of heating a sample in vacuum

*Freek Molkenboer¹, Han Velthuis¹, Peter Kerkhof¹, Arjan Burema¹, Hans Haasnoot¹, Thijs Hooftman¹, Henk Lensen¹ (1. TNO (Netherlands))

キーワード：vacuum, EUV