Optimizing Ionization and Deposition Rate in High Power Impulse Magnetron Sputtering

Presentation information

Parallel Sessions

ISSP / Surface Engineering

Wed. Sep 14, 2022 2:00 PM - 3:30 PM Room H (Meeting Room 204)

2:00 PM - 2:45 PM

*Daniel Lundin¹ (1. Linkoping University (Sweden))

Keywords:magnetron sputtering, HiPIMS, plasma modeling, IPVD

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