IVC-22

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Parallel Sessions

ISSP / Surface Engineering

[Wed-H1] ISSP / Surface Engineering

Wed. Sep 14, 2022 2:00 PM - 3:30 PM Room H (Meeting Room 204)

2:45 PM - 3:00 PM

[Wed-H1-2] Plasma diagnostics of multi-pulse HiPIMS discharge

*Jaroslav Hnilica1, Peter Klein1, Nikolay Britun2,3, Petr Vasina1 (1. Masaryk University (Czech Republic), 2. Université de Mons (Belgium), 3. Nagoya University (Japan))

Keywords:magnetron, HiPIMS, LIF, AAS

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