[Wed-PO1A] Poster Session (12:30-14:00) Category A

[Wed-PO1A-10] Hollow Cathode Discharge Used for Silver Incorporation into PECVD Diamond-like Carbon Coating

*Ying Hung Chen¹, Ping Yen Hsieh¹, Yu Han Wei¹, Ju Liang He¹ (1. Feng Chia University (Taiwan))

キーワード：Hollow Cathode Discharge, Silver Incorporation, PECVD, Diamond-like Carbon