Ni and SUS mixture thin film preparation using NiO2 and SUS powder mixture target

Hiroharu Kawasaki

[Wed-PO1A-12] Ni and SUS mixture thin film preparation using NiO₂ and SUS powder mixture target

*Hiroharu Kawasaki¹, Tamiko Ohshima¹, Yoshihito Yagyu¹, Takeshi Ihara¹, Yusuke Hibino¹, Yoshiaki Suda¹, Takahiko Satake^1,2, Shin-ichi Aoqui² (1. National Institute of Technology, Sasebo College (Japan), 2. Sojo University (Japan))

Keywords:Sputtering, Elemental gradient functional thin film, Powder target

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Presentation information

[Wed-PO1A] Poster Session (12:30-14:00) Category A

[Wed-PO1A-12] Ni and SUS mixture thin film preparation using NiO₂ and SUS powder mixture target

Presentation information

[Wed-PO1A] Poster Session (12:30-14:00) Category A

[Wed-PO1A-12] Ni and SUS mixture thin film preparation using NiO2 and SUS powder mixture target

[Wed-PO1A-12] Ni and SUS mixture thin film preparation using NiO₂ and SUS powder mixture target