[Wed-PO1A] Poster Session (12:30-14:00) Category A

[Wed-PO1A-18] Award Applied
Role of HiPIMS pulse frequency on the growth of pure zirconium thin films

*Tamaki Hattori¹, Naoto Saito¹, Ming Yang¹, Stephanos Konstantinidis², Tetsuhide Shimizu¹ (1. Graduate School of Systems Design, Tokyo Metropolitan University (Japan), 2. Plasma-Surface Interaction Chemistry(ChIPS), University of Mons (Belgium))

キーワード：HiPIMS, Pulse frequency, Pure zirconium, Microstructure, Oxygen incorporation