[Wed-PO1A] Poster Session (12:30-14:00) Category A

[Wed-PO1A-19] Award Applied
On the growth of boron carbon nitride coatings using HiPIMS with synchronized substrate bias

Hayate Nagakura¹, Yuya Anzai¹, Miki Kikuta¹, Ming Yang¹, *Tetsuhide Shimizu¹ (1. Tokyo Metropolitan University (Japan))

キーワード：HiPIMS、Boron carbon nitrides、Synchronized bias、Momentum transfer、FTIR