[Wed-PO1A] Poster Session (12:30-14:00) Category A

[Wed-PO1A-23] Examination of ion irradiation effect by property evaluation of Co thin films on a glass substrate prepared using magnetron sputtering with multipolar magnetic confinement

*Hiroshi Toyota¹ (1. Hiroshima Institute of Technology (Japan))

Keywords:ion irradiation effect, sputtering, Co thin film