[Mon-PO1C] Poster Session (17:30-19:00) Category C

[Mon-PO1C-25] Non-Destructive Thin Film Analysis of Semiconductor Materials by
Angle Resolved HAXPES and AR XPS

Hsun-Yun Chang¹, Wei-Chun Lin², Yu-Chun Huang³, *Masahiro Terashima¹, Katsumi Watanabe¹, Kateryna Artyushkova⁴, Maki Hashimoto¹, Shinichi Iida¹ (1. ULVAC-PHI, Inc. (Japan), 2. National Chung Shan University (Taiwan), 3. Metals Industry Research and Development Center (Taiwan), 4. Physical Electronics (United States of America))

Keywords:HAXPES, XPS, high-k