2:00 PM - 2:15 PM
[R1-01] Characteristics and problems of absorption correction in quantitative chemical analysis by ATEM
Keywords:Analytical TEM, Quantitative chemical analysis, Absorption correction
The method of absorption correction in quantitative chemical analysis by analytical TEM is very useful to analyze the compositions of the narrow regions of the specimens. However, the usage of this method is rather limited because the procedure to find the foil thickness used for the calculation is not well established. We found the proper procedure to find the foil thickness to obtain the correct compositions of the specimens. In the presentation, this procedure is presented, together with whether the obtained thickness coincides with the actual thickness or not.