The 10th JFPS International Symposium on Fluid Power 2017

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Oral Presentation

Oil hydraulics

[2A13-17] H8 (Control & Measurements 2)

Thu. Oct 26, 2017 3:30 PM - 4:50 PM Room A (ACROS Fukuoka)

Chair:Yasunori Wakasawa(National Institute of Technology, Toyota College), Kazushi Sanada(Yokohama National University)

3:30 PM - 3:46 PM

[2A13] NEW HIGH SENSITIVITY MEMS SENSOR FOR INDIRECT PRESSURE MEASUREMENT

*Massimiliano Ruggeri1, Giorgio Massarotti1, Esteban CODINA2 (1. CNR-IMAMOTER, 2. Universitat Politècnica de Catalunya)

Keywords:Pressure Measurement, MEMS, DETF Strain Sensor, Gear Pump