NEW HIGH SENSITIVITY MEMS SENSOR FOR INDIRECT PRESSURE MEASUREMENT

講演情報

Oral Presentation

Oil hydraulics

2017年10月26日(木) 15:30 〜 16:50 Room A (ACROS Fukuoka)

Chair:Yasunori Wakasawa(National Institute of Technology, Toyota College), Kazushi Sanada(Yokohama National University)

15:30 〜 15:46

*Massimiliano Ruggeri¹, Giorgio Massarotti¹, Esteban CODINA² (1. CNR-IMAMOTER, 2. Universitat Politècnica de Catalunya)

キーワード：Pressure Measurement, MEMS, DETF Strain Sensor, Gear Pump