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[355] Investigation and discussion of substrates used for metallic glass Pre-Imprint process
Keywords:金属ガラス、Imprint加工、Pre-Imprint処理
Pre-Imprint処理は一度過冷却液体領域まで加熱しないといけないため,熱履歴に大きな影響を受ける.本研究では,実際にPre-Imprint処理を行い,基板変化によるリボンの平坦/熱履歴/相状態を確認し評価を行った.
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