In-situ observation of AlN crystal growth on Fe-Al melts

Presentation information

JIM-ISIJ Joint Session

[J] JIM-ISIJ Joint Session Physico-chemical Properties of High Temperature Melts

Thu. Mar 19, 2020 9:30 AM - 3:30 PM ISIJ Rm. No.2 (S222, 2nd Flr., South building No.2)

Chair:Hiroyuki Shibata(Tohoku Univ.), Sohei SUKENAGA, Noritaka Saito

10:10 AM - 10:30 AM

*YAMAGATA Takefumi¹, ADACHI Masayoshi¹, OHTSUKA Makoto¹, FUKUYAMA Hiroyuki¹ (1. IMRAM, Tohoku Univ.)

Keywords:結晶成長、半導体材料、表面分析法、単結晶製造技術

電磁浮遊法を用いて，Fe-Al融液からのAlN結晶成長のその場観察を行い，AlNの生成・成長挙動の調査をした．

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