[S7] Architecture construction for functions and properties of materials II -Prediction and analysis based on theoretical and experimental approaches for microstructure controlling

[S7.10] Crystallinity Evaluation of Single Crystal Diamond Wafers by using HR-EBSD Technics

*Koji TANAKA¹, Miwako TAKANO², Minoru TACHIKI², Shinya OHMAGARI¹, UMEZAWA Hitoshi¹, Yamada Hideaki¹ (1. Natl. Inst. of Adv. Ind. Sci. and Tech. (AIST), 2. Natl. Inst. for Maters. Sci. (NIMS))

Keywords:結晶性、高分解能EBSD、単結晶、ダイヤモンド基板、CVD、高圧高温合成

高分解能EBSD法により、単結晶ダイヤモンドの結晶性評価が行えるかどうか検討した結果を発表する