[G] Electric/Electronic/Optical Materials

[122] Evaluation of piezoresistive property for Cr₂Ge₂Te₆ films

*Yinli WANG¹, Yi SHUANG², Mayu NAKAJIMA¹, Daisuke ANDO¹, Fumio NARITA³, Yuji SUTOU^1,2 (1. Tohoku Univ. (Eng.), 2. AIMR, 3. Tohoku Univ. (Env. ))

Keywords:piezoresistive、phase-change film、semiconductor

Piezoresistive performance of Cr₂Ge₂Te₆ thin film was evaluated under different local structure phases, including amorphous phase and stable phase.