[S9] S9.Materials Science and high temperature processing of widegap materials V

[S9.4] Solution Growth of AlN single crystal in Fe-Cr flux

*Sen Li¹, Masayoshi Adachi¹, Makoto Ohtsuka¹, Hiroyuki Fukuyama¹ (1. Tohoku University)

Keywords:AlN single crystal、Solution growth

AlN single crystals were epitaxially grown on an AlN bulk substrate by a solution growth method using Fe-Cr flux. XRCs, SEM, SIMS were performed to characterize the quality of synthesized AlN.