[2Yin5] インタラクティブ2

[2Yin5-19] Applying Machine Learning to Accuracy Evaluation of Position Detection based on Phase Only Correlation

〇Shinya OKONOGI¹, Shinnosuke Tomiyama¹, Masashi Yamamoto¹, Jun Kitagawa¹, Futa Kitaoka¹, Qu Zhang¹ (1.Canon Inc.)

Keywords:machine learning, phase only correlation, position detection

In previous researches, we introduced Phase Only Correlation (POC) to the image-processing-based alignment method for lithography. However, the accuracy of alignment results varied from case to case. In this research, we carry out an accuracy evaluation method, where multiple AI models are applied and compared. We managed to achieve a 96% accuracy and a 99% recall from the best performed model.