The 74th JSAP Autumn Meeting,2013

Session information

Symposium

Symposium planned by Program Committee » Possibilities of reactive deposition process by high power impulse magnetron sputtering

[18p-C5-1~8] Possibilities of reactive deposition process by high power impulse magnetron sputtering

Wed. Sep 18, 2013 2:00 PM - 6:15 PM C5 (TC3 1F-115)

△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation

Break (3:30 PM - 3:45 PM)

Break (5:00 PM - 5:15 PM)